Invention Grant
- Patent Title: Electronic device having thin film transistor using organic semiconductor and method of manufacturing the same
- Patent Title (中): 具有使用有机半导体的薄膜晶体管的电子器件及其制造方法
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Application No.: US14658563Application Date: 2015-03-16
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Publication No.: US09466796B2Publication Date: 2016-10-11
- Inventor: Masahiko Akiyama
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2014-057008 20140319
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/05

Abstract:
According to one embodiment, there is provided a manufacturing method of an electronic device including a lower electrode, a source electrode and a drain electrode made of a nanoparticulate conductive material on a substrate, an organic semiconductor layer between the source and drain electrodes, and a gate electrode on the organic semiconductor layer via a gate insulating layer. The manufacturing method includes forming a nonphotosensitive resin layer as the gate insulating layer on the organic semiconductor layer and on the lower electrode, forming a photosensitive resin layer as the gate insulating layer on the nonphotosensitive resin layer, and forming a through hole in the photosensitive resin layer on the lower electrode.
Public/Granted literature
- US20150270488A1 ELECTRONIC DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2015-09-24
Information query
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