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US09466796B2 Electronic device having thin film transistor using organic semiconductor and method of manufacturing the same 有权
具有使用有机半导体的薄膜晶体管的电子器件及其制造方法

Electronic device having thin film transistor using organic semiconductor and method of manufacturing the same
Abstract:
According to one embodiment, there is provided a manufacturing method of an electronic device including a lower electrode, a source electrode and a drain electrode made of a nanoparticulate conductive material on a substrate, an organic semiconductor layer between the source and drain electrodes, and a gate electrode on the organic semiconductor layer via a gate insulating layer. The manufacturing method includes forming a nonphotosensitive resin layer as the gate insulating layer on the organic semiconductor layer and on the lower electrode, forming a photosensitive resin layer as the gate insulating layer on the nonphotosensitive resin layer, and forming a through hole in the photosensitive resin layer on the lower electrode.
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