Invention Grant
- Patent Title: Plasma reactor for abatement of hazardous material
- Patent Title (中): 用于消除有害物质的等离子体反应器
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Application No.: US14698938Application Date: 2015-04-29
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Publication No.: US09472381B2Publication Date: 2016-10-18
- Inventor: Min Hur , Woo Seok Kang , Jae Ok Lee
- Applicant: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Applicant Address: KR Daejeon
- Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee Address: KR Daejeon
- Agency: Lex IP Meister, PLLC
- Priority: KR10-2014-0052436 20140430; KR10-2014-0083093 20140703
- Main IPC: B01D53/32
- IPC: B01D53/32 ; H01J37/32 ; H05H1/46

Abstract:
A plasma reactor for abating hazardous materials included in process gases while being installed on an exhaust path of the process gases toward a vacuum pump is provided. The plasma reactor includes an insulator having a pipe shape through which process gases pass, a first ground electrode connected to a front end of the insulator facing the process chamber, a second ground electrode connected to a rear end of the insulator and provided with a facing part that faces a center of the inside of the insulator along the moving direction of process gases, and a driving electrode fixed to an external circumferential surface of the insulator and connected to a power supply applying an AC or RF voltage.
Public/Granted literature
- US20150314233A1 PLASMA REACTOR FOR ABATEMENT OF HAZARDOUS MATERIAL Public/Granted day:2015-11-05
Information query
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