Invention Grant
- Patent Title: Wafer divider and wafer division method
- Patent Title (中): 晶圆分割器和晶圆分割方法
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Application No.: US15046672Application Date: 2016-02-18
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Publication No.: US09472459B2Publication Date: 2016-10-18
- Inventor: Naotoshi Kirihara
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2015-031540 20150220
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L21/78 ; B28D5/00

Abstract:
A divider which divides a wafer having a division start points formed along the scheduled divisions into a plurality of device chips. The divider includes a placement table on which a wafer is placed, and division unit adapted to divide the wafer on the placement table into a plurality of device chips starting from the division start points. The placement table includes: a plurality of spherical bodies having the same diameter; a container that accommodates the plurality of spherical bodies in close contact with each other; and a placement surface formed by connecting vertices of spherical surfaces of the plurality of spherical bodies that are accommodated in close contact with each other.
Public/Granted literature
- US20160247723A1 WAFER DIVIDER AND WAFER DIVISION METHOD Public/Granted day:2016-08-25
Information query
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