Invention Grant
US09473047B2 Method for reduction of stiction while manipulating micro objects on a surface 有权
在操纵表面上的微物体时减少静摩擦的方法

Method for reduction of stiction while manipulating micro objects on a surface
Abstract:
A system and method reduce stiction while manipulating micro objects on a surface. The system and method employed a field generator configured to generate a driving force at a frequency and amplitude to at least partially overcome stiction between the micro objects and the surface. The field generator is further configured to generate a manipulation force to manipulate the micro objects on the surface in two dimensions. The manipulation force is spatially programmable.
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