Invention Grant
- Patent Title: Surface acoustic wave filter
- Patent Title (中): 表面声波滤波器
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Application No.: US14541242Application Date: 2014-11-14
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Publication No.: US09473104B2Publication Date: 2016-10-18
- Inventor: Yuji Toyota
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2013-247748 20131129
- Main IPC: H03H9/64
- IPC: H03H9/64 ; H03H9/02 ; H03H9/05

Abstract:
A surface acoustic wave filter includes a piezoelectric substrate, a lower-layer wiring line, an upper-layer wiring line, and an interlayer insulating film. The lower-layer wiring line is disposed on the piezoelectric substrate. The upper-layer wiring line crosses the lower-layer wiring line. The upper-layer wiring line has a potential that is different from the potential of the lower-layer wiring line. The interlayer insulating film is disposed between the lower-layer wiring line and the upper-layer wiring line. The interlayer insulating film has a portion that has a width that is not greater than the width of the upper-layer wiring line in a cross-sectional view taken along a direction in which the lower-layer wiring line extends.
Public/Granted literature
- US20150155853A1 SURFACE ACOUSTIC WAVE FILTER Public/Granted day:2015-06-04
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