Invention Grant
- Patent Title: Method and measuring device for measuring the distance of a surface, thickness and optical properties of an object
- Patent Title (中): 用于测量物体的表面距离,厚度和光学性质的方法和测量装置
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Application No.: US14427127Application Date: 2013-09-17
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Publication No.: US09476707B2Publication Date: 2016-10-25
- Inventor: Heimo Keranen
- Applicant: FOCALSPEC OY
- Applicant Address: FI Oulu
- Assignee: FOCALSPEC OY
- Current Assignee: FOCALSPEC OY
- Current Assignee Address: FI Oulu
- Agency: Young & Thompson
- Priority: FI20125958 20120917
- International Application: PCT/FI2013/050898 WO 20130917
- International Announcement: WO2014/041254 WO 20140320
- Main IPC: G01C3/08
- IPC: G01C3/08 ; G01N21/57 ; G01N21/47 ; G01N21/84 ; G01B11/06 ; G01B9/02 ; G01N21/49

Abstract:
In the measuring device and measuring method, confocal measuring principle is utilized. A certain component of an optical measurement signal is, from the point of view of both illumination and imaging, in focus only at one point on the virtual measuring surface. In the measuring device, the surface to be measured always hits a common focus point of the illumination and imaging, whereby a reflection is generated. The reflected optical signal is directed to a detector belonging to the imaging unit, where one picture element of the detector corresponds to a certain focus point, respectively. The optical efficiency received by each picture element is indicated. The light reflecting from the intersection of the virtual measuring surface and the surface of the object produces an intensity maximum for the detector. This maximum point is indicated and converted in the imaging unit (13) into the height of the surface of the object.
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