Invention Grant
US09476746B2 Miniaturized sensor comprising a heating element, and associated production method
有权
微型传感器包括加热元件和相关联的制造方法
- Patent Title: Miniaturized sensor comprising a heating element, and associated production method
- Patent Title (中): 微型传感器包括加热元件和相关联的制造方法
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Application No.: US14232040Application Date: 2012-07-12
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Publication No.: US09476746B2Publication Date: 2016-10-25
- Inventor: Romain Viard , Abdelkrim Talbi , Philippe Jacques Pernod , Alain Merlen , Vladimir Preobrazhensky
- Applicant: Romain Viard , Abdelkrim Talbi , Philippe Jacques Pernod , Alain Merlen , Vladimir Preobrazhensky
- Applicant Address: FR Paris FR Villeneuve d'Ascq
- Assignee: Centre National de la Recherche Scientifique,Ecole Centrale de Lille
- Current Assignee: Centre National de la Recherche Scientifique,Ecole Centrale de Lille
- Current Assignee Address: FR Paris FR Villeneuve d'Ascq
- Agency: Alston & Bird LLP
- Priority: FR1156409 20110713
- International Application: PCT/IB2012/053578 WO 20120712
- International Announcement: WO2013/008203 WO 20130117
- Main IPC: G01F1/688
- IPC: G01F1/688 ; B81B3/00 ; G01F1/684 ; G01L21/12 ; H01L41/316 ; H01L41/332
Abstract:
The invention relates to a miniaturized sensor having a heating element, and to an associated production method. The sensor includes a substrate, a cavity and a heat-insulating structure suspended above the cavity by areas connecting to the substrate. The heat-insulating structure includes at least two bridges extending above the cavity, the heating element being supported by said bridges, extending transversely thereto.
Public/Granted literature
- US20140157887A1 Miniaturised Sensor Comprising A Heating Element, And Associated Production Method Public/Granted day:2014-06-12
Information query
