Invention Grant
US09478641B2 Method for fabricating FinFET with separated double gates on bulk silicon
有权
在体硅上分离双栅极制造FinFET的方法
- Patent Title: Method for fabricating FinFET with separated double gates on bulk silicon
- Patent Title (中): 在体硅上分离双栅极制造FinFET的方法
-
Application No.: US14006219Application Date: 2012-10-11
-
Publication No.: US09478641B2Publication Date: 2016-10-25
- Inventor: Ru Huang , Jiewen Fan , Xiaoyan Xu , Jia Li , Runsheng Wang
- Applicant: PEKING UNIVERSITY
- Applicant Address: CN Beijing
- Assignee: PEKING UNIVERSITY
- Current Assignee: PEKING UNIVERSITY
- Current Assignee Address: CN Beijing
- Agency: Dickinson Wright PLLC
- Priority: CN201210313475 20120829
- International Application: PCT/CN2012/082797 WO 20121011
- International Announcement: WO2014/032361 WO 20140306
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L21/02 ; H01L21/027 ; H01L21/311 ; H01L21/306 ; H01L21/28 ; H01L21/321 ; H01L21/3213 ; H01L21/265 ; H01L21/324 ; H01L29/06

Abstract:
Disclosed herein is a method for fabricating a FinFET with separated double gates on a bulk silicon, comprising: forming a pattern for a source, a drain and a thin bar connecting the source and the drain; forming an oxidation isolation layer; forming a gate structure and a source/drain structure; and forming a metal contact and a metal interconnection. By means of the method herein, it is very easy to fabricate the FinFET with separated double gates on the bulk silicon wafer, and the overall process flow is completely compatible with the conventional silicon-based very large scale integrated circuit manufacturing technology. Thus, the method herein is simple, convenient and has a short process period, greatly economizing the cost of the silicon wafer. In addition, by employing the FinFET with separated double gates fabricated by the method according to the invention, the short channel effect can be effectively suppressed. Further, the power consumption of the device can be further reduced through the special multi-threshold characteristic of the device with separated double gates.
Public/Granted literature
- US20150236130A1 METHOD FOR FABRICATING FINFET WITH SEPARATED DOUBLE GATES ON BULK SILICON Public/Granted day:2015-08-20
Information query
IPC分类: