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US09478681B2 Fabrication of optical elements and modules incorporating the same 有权
包含该光学元件的光学元件和模块的制造

Fabrication of optical elements and modules incorporating the same
Abstract:
Fabricating a wafer-scale spacer/optics structure includes replicating optical replication elements and spacer replication sections directly onto an optics wafer (or other wafer) using a single replication tool. The replicated optical elements and spacer elements can be composed of the same or different materials.
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