Invention Grant
US09478791B2 Method for forming pattern, structural body, method for producing comb-shaped electrode, and secondary cell 有权
形成图案,结构体,梳状电极的制造方法和二次电池的方法

Method for forming pattern, structural body, method for producing comb-shaped electrode, and secondary cell
Abstract:
A method for forming a pattern multiple patterns of identical or different pattern materials can be formed on a support in a short time, a structural body, a method for producing a comb-shaped electrode, and a secondary cell. The pattern forming method, in which n patterns (n≧2) are formed on a support, includes forming a first resist layer on the support surface; repeating: forming a guide hole through all resist layers by exposure and development, filling a kth pattern material into the guide hole by a screen printing process, and forming a (k+1)th resist layer on the kth resist layer and the pattern materials, regarding kth (k=1 to n−1) pattern material and resist layer in order of k=1 to n−1; performing guide hole formation and nth pattern material filling similarly, and removing all of the resist layers.
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