Invention Grant
US09481925B2 Titanium diboride target 有权
二硼化钛靶

  • Patent Title: Titanium diboride target
  • Patent Title (中): 二硼化钛靶
  • Application No.: US13696117
    Application Date: 2011-05-02
  • Publication No.: US09481925B2
    Publication Date: 2016-11-01
  • Inventor: Michael O'Sullivan
  • Applicant: Michael O'Sullivan
  • Applicant Address: AT Reutte
  • Assignee: Plansee SE
  • Current Assignee: Plansee SE
  • Current Assignee Address: AT Reutte
  • Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
  • Priority: ATGM288/2010 20100504
  • International Application: PCT/AT2011/000209 WO 20110502
  • International Announcement: WO2011/137472 WO 20111110
  • Main IPC: C23C14/34
  • IPC: C23C14/34 B22F3/15 C23C14/06 C04B35/58 C22C1/10
Titanium diboride target
Abstract:
A titanium diboride target contains fractions of one or more metals from the group including iron, nickel, cobalt and chromium as well as carbon. The mean grain size of TiB2 grains is between 1 μm and 20 μm, the carbon content is in a range of 0.1 to 5% by weight and the total content of Fe, Ni, Co and/or Cr is in a range of 500 to 3,000 μg/g. The carbon is distributed in free form at the grain boundaries of the TiB2 grains in such a way that mean distances between individual carbon particles are less than 20 μm. The porosity is less than 5% by volume.
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