Invention Grant
US09482533B2 Vibrating reed, angular velocity sensor, electronic device, and moving object
有权
振动簧片,角速度传感器,电子设备和移动物体
- Patent Title: Vibrating reed, angular velocity sensor, electronic device, and moving object
- Patent Title (中): 振动簧片,角速度传感器,电子设备和移动物体
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Application No.: US14526866Application Date: 2014-10-29
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Publication No.: US09482533B2Publication Date: 2016-11-01
- Inventor: Atsushi Matsuo
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-226032 20131030
- Main IPC: G01D21/00
- IPC: G01D21/00 ; G01C19/5607

Abstract:
The vibrating reed includes a first main surface and a second main surface that face each other in the thickness direction of a piezoelectric body and a detection unit that vibrates along the thickness direction when detecting. The detection unit includes a groove of which a groove bottom is positioned at a position beyond a midline between the first main surface and the second main surface in the depth direction from an opening formed in the first main surface, an inside surface electrode that is formed on an inside surface facing the inside of the groove, an outside surface electrode that is formed on an outside surface which is opposite the inside surface with the piezoelectric body interposed there between, and a pair of groove bottom electrodes that is provided further on the groove bottom at an interval than the midline and face inside the groove.
Public/Granted literature
- US20150114126A1 VIBRATING REED, ANGULAR VELOCITY SENSOR, ELECTRONIC DEVICE, AND MOVING OBJECT Public/Granted day:2015-04-30
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