Invention Grant
- Patent Title: Stacked nanowire devices
- Patent Title (中): 堆叠的纳米线器件
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Application No.: US15015347Application Date: 2016-02-04
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Publication No.: US09484267B1Publication Date: 2016-11-01
- Inventor: Kangguo Cheng , Ramachandra Divakaruni , Juntao Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8238 ; H01L29/66 ; H01L29/06 ; H01L29/161 ; H01L29/423 ; H01L27/092
Abstract:
A semiconductor device comprises first stack of nanowires arranged on a substrate comprises a first nanowire and a second nanowire, the second nanowire is arranged substantially co-planar in a first plane with the first nanowire the first nanowire and the second nanowire arranged substantially parallel with the substrate, a second stack of nanowires comprises a third nanowire and a fourth nanowire, the third nanowire and the fourth nanowire arranged substantially co-planar in the first plane with the first nanowire, and the first nanowire and the second nanowire comprises a first semiconductor material and the third nanowire and the fourth nanowire comprises a second semiconductor material, the first semiconductor material dissimilar from the second semiconductor material.
Information query
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