Invention Grant
- Patent Title: Manufacturing method of semiconductor device and semiconductor device
- Patent Title (中): 半导体器件和半导体器件的制造方法
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Application No.: US14437445Application Date: 2013-10-22
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Publication No.: US09484387B2Publication Date: 2016-11-01
- Inventor: Makoto Shizukuishi
- Applicant: Makoto Shizukuishi
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-232941 20121022
- International Application: PCT/JP2013/018579 WO 20131022
- International Announcement: WO2014/065278 WO 20140501
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/146 ; H01L27/02 ; H01L23/48 ; H01L23/60 ; H01L25/065 ; H01L25/00 ; H01L21/3213 ; H01L21/768 ; H01L21/82

Abstract:
A method of manufacturing a stacked semiconductor device having two or more wafers may include forming a conductor on an upper wafer, the conductor configured to electrically connect input terminals together that have no input protection circuit against ESD; forming front side micro-bumps on a front side of the upper wafer, the front side micro-bumps configured to electrically connect to back side micro-bumps on the upper wafer; forming a TSV structure, the TSV structure configured to facilitate electrical connections between the front and the back side of the upper wafer; forming back side micro-bumps on the back side of the upper wafer, the back side micro-bumps configured to electrically connect with front side micro-bumps on the lower wafer; stacking the upper wafer on the lower wafer; and separating the conductor such that each of the input terminals are electrically independent from other ones of the input terminals.
Public/Granted literature
- US20150279881A1 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2015-10-01
Information query
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