Invention Grant
US09484404B2 Electronic device of vertical MOS type with termination trenches having variable depth
有权
具有可变深度的端接沟槽的垂直MOS型电子器件
- Patent Title: Electronic device of vertical MOS type with termination trenches having variable depth
- Patent Title (中): 具有可变深度的端接沟槽的垂直MOS型电子器件
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Application No.: US14609320Application Date: 2015-01-29
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Publication No.: US09484404B2Publication Date: 2016-11-01
- Inventor: Giacomo Barletta , Angelo Magrí
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITMI2014A0116 20140129
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/74 ; H01L21/70 ; H01L29/06 ; H01L29/78 ; H01L29/739

Abstract:
An electronic device is integrated on a chip of semiconductor material having a main surface and a substrate region with a first type of conductivity. The electronic device has a vertical MOS transistor, formed in an active area having a body region with a second conductivity type. A set of one or more cells each one having a source region of the first conductivity, a gate region of electrically conductive material in a gate trench extending from the main surface in the body region and in the substrate region, and an insulating gate layer, and a termination structure with a plurality of termination rings surrounding at least part of the active area on the main surface, each termination ring having a floating element of electrically insulating material in the termination trench extending from the main surface in the chip and at least one bottom region of said semiconductor material of the second conductivity type extending from at least one deepest portion of a surface of the termination trench in the chip; the termination trenches have a depth from the main surface decreasing moving away from the active area.
Public/Granted literature
- US20150214300A1 ELECTRONIC DEVICE OF VERTICAL MOS TYPE WITH TERMINATION TRENCHES HAVING VARIABLE DEPTH Public/Granted day:2015-07-30
Information query
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