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US09484883B2 Acoustic wave device and fabrication method of the same 有权
声波装置及其制造方法

Acoustic wave device and fabrication method of the same
Abstract:
An acoustic wave device includes: a substrate; an input terminal that is located on a first surface of the substrate, and to which a high-frequency signal is input; a resonator that is connected to the input terminal, and to which a high-frequency signal input to the input terminal is input; and an insulating layer that is located between the input terminal and the substrate, and has a permittivity smaller than that of the substrate.
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