Invention Grant
US09485810B2 Handler and inspection apparatus 有权
处理器和检验仪器

Handler and inspection apparatus
Abstract:
A handler includes: a rotating section which is a holding unit mounting section which can take a mounted state in which a holding unit for holding an IC device is mounted; and a transportation mechanism which transports the IC device held by the holding unit. The rotating section includes a heat generation section which generates heat and a heating flow path through which fluid which is heated by the heat generation section and is used for heating of the IC device passes.
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