Invention Grant
- Patent Title: Pattern transfer with self-assembled nanoparticle assemblies
- Patent Title (中): 带有自组装纳米颗粒组件的图案转移
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Application No.: US13907716Application Date: 2013-05-31
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Publication No.: US09487869B2Publication Date: 2016-11-08
- Inventor: Sara Majetich , Tianlong Wen
- Applicant: Carnegie Mellon University
- Applicant Address: US PA Pittsburgh
- Assignee: Carnegie Mellon University
- Current Assignee: Carnegie Mellon University
- Current Assignee Address: US PA Pittsburgh
- Agency: Fish & Richardson P.C.
- Main IPC: C23F1/04
- IPC: C23F1/04 ; B05D3/14 ; G03F7/00 ; B82Y40/00
Abstract:
In one aspect, a method comprises: providing a substrate having at least one layer in which the patterned dot array is to be fabricated; depositing a nanoparticle layer, wherein the nanoparticle layer comprises one or more surfactants and nanoparticles coated with the one or more surfactants; treating the one or more surfactants that coat the nanoparticles and the portions of the one or more surfactants that fill the spaces among the nanoparticles; removing the portions of the one or more surfactants that fill the spaces among the nanoparticles to expose portions of the at least one layer in which the patterned dot array is to be fabricated; etching the exposed portions of the at least one layer in which the patterned dot array is to be fabricated; and removing at least a portion of the nanoparticles.
Public/Granted literature
- US20130327636A1 Pattern Transfer With Self-assembled Nanoparticle Assemblies Public/Granted day:2013-12-12
Information query
IPC分类:
