Invention Grant
US09495991B2 Method for forming silicon oxide and metal nanopattern's, and magnetic recording medium for information storage using the same 有权
用于形成氧化硅和金属纳米图案的方法,以及用于使用其的信息存储的磁记录介质

Method for forming silicon oxide and metal nanopattern's, and magnetic recording medium for information storage using the same
Abstract:
The present invention relates to a method for forming a silicon oxide nanopattern, in which the method can be used to easily form a nanodot or nanohole-type nanopattern, and a metal nanopattern formed by using the same can be properly applied to a next-generation magnetic recording medium for storage information, etc., a method for forming a metal nanopattern, and a magnetic recording medium for information storage using the same.The method for forming a silicon oxide nanopattern includes the steps of forming a block copolymer thin film including specific hard segments and soft segments containing a (meth)acrylate-based repeating unit on silicon oxide of a substrate; conducting orientation of the thin film; selectively removing the soft segments from the block copolymer thin film; and conducting reactive ion etching of silicon oxide using the block copolymer thin film from which the soft segments are removed, as a mask to form a silicon oxide nanodot or nanohole pattern.
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