Invention Grant
US09495991B2 Method for forming silicon oxide and metal nanopattern's, and magnetic recording medium for information storage using the same
有权
用于形成氧化硅和金属纳米图案的方法,以及用于使用其的信息存储的磁记录介质
- Patent Title: Method for forming silicon oxide and metal nanopattern's, and magnetic recording medium for information storage using the same
- Patent Title (中): 用于形成氧化硅和金属纳米图案的方法,以及用于使用其的信息存储的磁记录介质
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Application No.: US14419616Application Date: 2013-09-09
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Publication No.: US09495991B2Publication Date: 2016-11-15
- Inventor: Yang Kyoo Han , Je Gwon Lee , Hyun Jin Lee , No Ma Kim , Sung Soo Yoon , Eun Ji Shin , Yeon Sik Jung
- Applicant: LG CHEM, LTD. , IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
- Applicant Address: KR Seoul KR Seoul
- Assignee: LG CHEM, LTD.,IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Current Assignee: LG CHEM, LTD.,IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Current Assignee Address: KR Seoul KR Seoul
- Agency: Dentons US LLP
- Priority: KR10-2012-0100033 20120910
- International Application: PCT/KR2013/008027 WO 20130909
- International Announcement: WO2014/038869 WO 20140313
- Main IPC: G11B5/855
- IPC: G11B5/855 ; H01L21/3065 ; G03F7/00 ; G11B5/84 ; G11B5/851 ; H01L21/027 ; G11B5/74 ; B81C1/00 ; B82Y10/00 ; B82Y40/00 ; C08F220/18 ; C08F220/56

Abstract:
The present invention relates to a method for forming a silicon oxide nanopattern, in which the method can be used to easily form a nanodot or nanohole-type nanopattern, and a metal nanopattern formed by using the same can be properly applied to a next-generation magnetic recording medium for storage information, etc., a method for forming a metal nanopattern, and a magnetic recording medium for information storage using the same.The method for forming a silicon oxide nanopattern includes the steps of forming a block copolymer thin film including specific hard segments and soft segments containing a (meth)acrylate-based repeating unit on silicon oxide of a substrate; conducting orientation of the thin film; selectively removing the soft segments from the block copolymer thin film; and conducting reactive ion etching of silicon oxide using the block copolymer thin film from which the soft segments are removed, as a mask to form a silicon oxide nanodot or nanohole pattern.
Public/Granted literature
Information query
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