Invention Grant
- Patent Title: Setup for multiple cross-section sample preparation
- Patent Title (中): 设置多个横截面样品制备
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Application No.: US14084636Application Date: 2013-11-20
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Publication No.: US09496187B2Publication Date: 2016-11-15
- Inventor: Tsu Hau Ng , Zhihong Mai , Mohammed Khalid Bin Dawood , Pik Kee Tan , Yamin Huang , Jeffrey Chor-Keung Lam
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: B24B41/06
- IPC: B24B41/06 ; H01L21/66 ; B24B49/12 ; G01N1/32

Abstract:
A multiple-sample-holder polishing setup for cross-section sample preparation and a method of making a device using the same are presented. The multiple-sample-holder polishing setup includes a frame. The frame has a hollow center, one or more long and short rods and a recess for accommodating a polishing head. The setup includes one or more sample holders. The sample holder is to be attached to the one or more long and short rods of the frame. A paddle is affixed to each sample holder. A sample is attached to the paddle. The sample is coated with a thin epoxy layer prior to polishing thereby allowing for easy inspection for site of interests as well as quick material removal.
Public/Granted literature
- US20150140688A1 SETUP FOR MULTIPLE CROSS-SECTION SAMPLE PREPARATION Public/Granted day:2015-05-21
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