Invention Grant
US09496272B2 3D memory having NAND strings switched by transistors with elongated polysilicon gates
有权
具有由具有细长多晶硅栅极的晶体管切换的NAND串的3D存储器
- Patent Title: 3D memory having NAND strings switched by transistors with elongated polysilicon gates
- Patent Title (中): 具有由具有细长多晶硅栅极的晶体管切换的NAND串的3D存储器
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Application No.: US14494877Application Date: 2014-09-24
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Publication No.: US09496272B2Publication Date: 2016-11-15
- Inventor: Raul Adrian Cernea
- Applicant: SanDisk Technologies, Inc.
- Applicant Address: US TX Plano
- Assignee: SanDisk Technologies LLC
- Current Assignee: SanDisk Technologies LLC
- Current Assignee Address: US TX Plano
- Agency: Davis Wright Tremaine LLP
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
A 3D NAND memory has vertical NAND strings across multiple memory planes above a substrate, with each memory cell of a NAND string residing in a different memory layer. Word lines in each memory plane each has a series of socket components aligned to embed respective floating gates of a group memory cells. In this way, the word line to floating gate capacitive coupling is enhanced thereby allowing a 4 to 8 times reduction in cell dimension as well as reducing floating-gate perturbations between neighboring cells. In one embodiment, each NAND string has source and drain switches that each employs an elongated polysilicon gate with metal strapping to enhance switching. The memory is fabricated by an open-trench process on a multi-layer slab that creates lateral grottoes for forming the socket components.
Public/Granted literature
- US20160087055A1 3D MEMORY HAVING NAND STRINGS SWITCHED BY TRANSISTORS WITH ELONGATED POLYSILICON GATES Public/Granted day:2016-03-24
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