Invention Grant
US09496310B2 Photodetector, method of manufacturing photodetector, radiation detector, and radiation detection apparatus 有权
光检测器,光电检测器的制造方法,放射线检测器和放射线检测装置

Photodetector, method of manufacturing photodetector, radiation detector, and radiation detection apparatus
Abstract:
A photodetector according to an embodiment includes: a semiconductor substrate with a first and second faces; a groove formed on the second face; pixels disposed to the semiconductor substrate, each pixel including: light detection cells disposed on the first face, each light detection cell having a first and second terminals, each light detection cell being surrounded by the groove; a first wiring line disposed on the first face to connect to the first terminal of each of the detection cells; a first opening formed in the second face and penetrating the semiconductor substrate; a first insulating film covering the second face, a side face of the first opening, and a side face and a bottom of the groove; a second opening formed in the first insulating film; a first and second electrodes disposed in the first and second openings respectively; and a light blocking material filled to the groove.
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