Invention Grant
- Patent Title: Plasma processing method
- Patent Title (中): 等离子体处理方法
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Application No.: US14433522Application Date: 2013-10-30
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Publication No.: US09502219B2Publication Date: 2016-11-22
- Inventor: Yoshihide Kihara , Masaya Kawamata , Toshio Haga
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2012-243356 20121105
- International Application: PCT/JP2013/006428 WO 20131030
- International Announcement: WO2014/068974 WO 20140508
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01J37/32 ; H01L21/3065 ; H05H1/46 ; H01L21/311

Abstract:
The present disclosure provides a method of performing a plasma processing on a substrate by using a plasma processing apparatus including a processing container; an outer upper electrode provided to face a lower electrode; an inner upper electrode disposed inside the outer upper electrode; a first high-frequency power supply; a first power feeding unit; a second power feeding unit; and a variable condenser. The first and second power feeding units, a fixed condenser formed between the outer upper electrode and the inner upper electrode, and a closed circuit including the variable condenser become a resonance state when the variable condenser has a capacitance value in a predetermined resonance region. The method includes selectively using a capacitance value in a first region lower than the resonance region of the variable condenser and a capacitance value in a second region higher than the resonance region to perform the plasma processing.
Public/Granted literature
- US20150262794A1 PLASMA PROCESSING METHOD Public/Granted day:2015-09-17
Information query
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