Invention Grant
US09502446B2 Poly-silicon TFT, poly-silicon array substrate and preparing method thereof, display device
有权
多晶硅TFT,多晶硅阵列基板及其制备方法,显示装置
- Patent Title: Poly-silicon TFT, poly-silicon array substrate and preparing method thereof, display device
- Patent Title (中): 多晶硅TFT,多晶硅阵列基板及其制备方法,显示装置
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Application No.: US13985336Application Date: 2012-11-16
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Publication No.: US09502446B2Publication Date: 2016-11-22
- Inventor: Fangzhen Zhang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201210270680 20120731
- International Application: PCT/CN2012/084780 WO 20121116
- International Announcement: WO2014/019300 WO 20140206
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L29/04 ; H01L29/15 ; H01L31/036 ; H01L27/12 ; H01L29/66 ; H01L29/786

Abstract:
Provided are a poly-silicon thin film transistor (TFT), a poly-silicon array substrate and a preparing method thereof, and a display device for solving the problems of excessive mask plates, complicated process and high costs in a conventional technology. The method of preparing the poly-silicon TFT comprising a doped region comprises steps: forming a poly-silicon layer on a substrate, forming an active layer by a patterning process; forming a first insulating layer; forming, by a patterning process, via holes exposing the active layer, the source electrode and the drain electrode being connected through the via holes to the active layer; doping the active layer through the via holes by a doping process to form a doped region; forming a source-drain metal layer, and forming the source electrode and the drain electrode by a patterning process.
Public/Granted literature
- US20140077216A1 POLY-SILICON TFT, POLY-SILICON ARRAY SUBSTRATE AND PREPARING METHOD THEREOF, DISPLAY DEVICE Public/Granted day:2014-03-20
Information query
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