Invention Grant
US09502446B2 Poly-silicon TFT, poly-silicon array substrate and preparing method thereof, display device 有权
多晶硅TFT,多晶硅阵列基板及其制备方法,显示装置

Poly-silicon TFT, poly-silicon array substrate and preparing method thereof, display device
Abstract:
Provided are a poly-silicon thin film transistor (TFT), a poly-silicon array substrate and a preparing method thereof, and a display device for solving the problems of excessive mask plates, complicated process and high costs in a conventional technology. The method of preparing the poly-silicon TFT comprising a doped region comprises steps: forming a poly-silicon layer on a substrate, forming an active layer by a patterning process; forming a first insulating layer; forming, by a patterning process, via holes exposing the active layer, the source electrode and the drain electrode being connected through the via holes to the active layer; doping the active layer through the via holes by a doping process to form a doped region; forming a source-drain metal layer, and forming the source electrode and the drain electrode by a patterning process.
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