Invention Grant
US09502645B2 Semiconductor device, related manufacturing method, and related electronic device 有权
半导体器件,相关制造方法及相关电子器件

Semiconductor device, related manufacturing method, and related electronic device
Abstract:
A method for manufacturing a semiconductor device may include the following steps: preparing a substrate; preparing a first insulating layer on the substrate; preparing an electrode in the first insulating layer; preparing a second insulating layer on the first insulating layer; removing (e.g., using a dry etching process or a wet etching process) a portion of the second insulating layer to form a hole that at least partially exposes the electrode; providing a phase change material layer that may cover the electrode; and removing (e.g., using a sputtering process such as an argon sputtering process), a portion of the phase change material layer positioned inside the hole to form a phase change member that may expose a first portion of (a top side of) the electrode and may directly contact a second portion of (the top side of) the electrode.
Information query
Patent Agency Ranking
0/0