Invention Grant
- Patent Title: Micro-hydraulic device
- Patent Title (中): 微型液压装置
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Application No.: US14096409Application Date: 2013-12-04
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Publication No.: US09502995B2Publication Date: 2016-11-22
- Inventor: Khalil Najafi , Mahdi Sadeghi , Rebecca L. Peterson
- Applicant: The Regents of the University of Michigan
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of the University of Michigan
- Current Assignee: The Regents of the University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Dierker & Kavanaugh, P.C.
- Main IPC: G01M3/02
- IPC: G01M3/02 ; H02N11/00 ; B81B3/00

Abstract:
A micro-hydraulic device includes an enclosure. The enclosure includes a substrate having a first surface and a second surface distal to the first surface. The enclosure further includes a chamber defined between the first surface and the second surface. The chamber is defined by a wall substantially from the first surface to the second surface. The enclosure includes a first flexible membrane sealingly connected to the first surface and disposed over the chamber; and a second flexible membrane sealingly connected to the second surface disposed over the chamber distal to the first flexible membrane. The device further includes an internal fluid retained within the enclosure and a rigid electrode fixed within the chamber having an aperture therein. A flexible electrode is disposed on the second flexible membrane opposite the rigid electrode.
Public/Granted literature
- US20140224656A1 MICRO-HYDRAULIC DEVICE Public/Granted day:2014-08-14
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