Invention Grant
- Patent Title: Perpendicularly magnetized ultrathin film exhibiting high perpendicular magnetic anisotropy, method for manufacturing same, and application
- Patent Title (中): 具有高垂直磁各向异性的垂直磁化超薄膜,其制造方法和应用
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Application No.: US14367348Application Date: 2013-03-22
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Publication No.: US09508373B2Publication Date: 2016-11-29
- Inventor: Masamitsu Hayashi , Sinha Jaivardhan , Masaya Kodzuka , Tomoya Nakatani , Yukiko Takahashi , Takao Furubayashi , Seiji Mitani , Kazuhiro Hono
- Applicant: National Institute for Materials Science
- Applicant Address: JP Ibaraki
- Assignee: National Institute for Materials Science
- Current Assignee: National Institute for Materials Science
- Current Assignee Address: JP Ibaraki
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2012-065085 20120322
- International Application: PCT/JP2013/058226 WO 20130322
- International Announcement: WO2013/141337 WO 20130926
- Main IPC: G11C11/16
- IPC: G11C11/16 ; G11B5/66 ; G11B5/65 ; G11B5/64 ; G11B5/73 ; G11B5/851 ; H01L43/08 ; H01L43/10 ; H01L43/12 ; H01F10/30 ; H01F10/32 ; C23C14/06 ; C23C14/34 ; G01R33/00 ; G11C11/14 ; G01R33/09 ; G01R33/12 ; H01F10/00

Abstract:
Provided are an element structure in which a magnetic layer has a high magnetic anisotropy constant and saturated magnetization properties in a thickness of 1.5 nm or less, and a magnetic device that uses the element structure. A BCC metal nitride/CoFeB/MgO film structure that uses a nitride of a BCC metal as a seed layer is fabricated. The nitride amount in the BCC metal nitride is preferably less than 60% in terms of volume ratio based on 100% BCC metal. It is thereby possible to readily obtain a perpendicularly magnetized film having the magnetic properties that the perpendicular magnetic anisotropy is 0.1×106 erg/cm3 or more and the saturated magnetization is 200 emu/cm3 or more, even when the thickness of the magnetic layer is 0.3 nm or more and 1.5 nm or less.
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