Invention Grant
- Patent Title: Modification of magnetic properties of films using ion and neutral beam implantation
- Patent Title (中): 使用离子和中性束注入改性膜的磁性能
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Application No.: US12759597Application Date: 2010-04-13
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Publication No.: US09508375B2Publication Date: 2016-11-29
- Inventor: Majeed A. Foad , Nir Merry
- Applicant: Majeed A. Foad , Nir Merry
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/58 ; C23C14/48 ; G11B5/86 ; B82Y10/00 ; G11B5/74 ; G11B5/855

Abstract:
Methods and apparatus for forming substrates having magnetically patterned surfaces is provided. A magnetic layer comprising one or more materials having magnetic properties is formed on the substrate. The magnetic layer is subjected to a patterning process in which selected portions of the surface of the magnetic layer are altered such that the altered portions have different magnetic properties from the non-altered portions without changing the topography of the substrate. A protective layer and a lubricant layer are deposited over the patterned magnetic layer. The patterning is accomplished through a number of alternative processes that expose substrates to energy of varying forms.
Public/Granted literature
- US20100261040A1 MODIFICATION OF MAGNETIC PROPERTIES OF FILMS USING ION AND NEUTRAL BEAM IMPLANTATION Public/Granted day:2010-10-14
Information query
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