Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US14205128Application Date: 2014-03-11
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Publication No.: US09508822B2Publication Date: 2016-11-29
- Inventor: Toru Oka , Takahiro Sonoyama
- Applicant: TOYODA GOSEI CO., LTD.
- Applicant Address: JP Kiyosu-shi, Aichi-ken
- Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee: Toyoda Gosei Co., Ltd.
- Current Assignee Address: JP Kiyosu-shi, Aichi-ken
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2013-069258 20130328
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/51 ; H01L29/778 ; H01L29/20 ; H01L29/78 ; H01L29/423

Abstract:
A semiconductor device comprises: a gate insulating film 190 stacked on a semiconductor layer 130; and a gate electrode layer 230 stacked on the gate insulating film 190 and provided to apply a voltage via the gate insulating film 190 for formation of a channel in the semiconductor layer 130. The gate insulating film 190 includes: a first insulation film 192 stacked on the semiconductor layer 130; and a second insulation film 194 between the first insulation film 192 and the gate electrode layer 230. When ∈1 and ∈2 respectively represent relative permittivities of the first and second insulation film 192, 194, d1 [nm] and d2 [nm] represent film thicknesses of the first and second insulation film 192, 194, and Vmax [V] represents a rated voltage applicable to the gate electrode layer 230, the semiconductor device is configured to satisfy ∈1
Public/Granted literature
- US20140291775A1 SEMICONDUCTOR DEVICE Public/Granted day:2014-10-02
Information query
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