Invention Grant
- Patent Title: Phase change memory having a funnel-shaped heater and method of manufacturing the same
- Patent Title (中): 具有漏斗形加热器的相变存储器及其制造方法
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Application No.: US14986732Application Date: 2016-01-04
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Publication No.: US09508927B1Publication Date: 2016-11-29
- Inventor: Yi-Fang Tao , Yu-Jen Lin
- Applicant: Ningbo Advanced Memory Technology Corporation , Being Advanced Memory Taiwan Limited
- Applicant Address: CN Ningbo TW Hsinchu County
- Assignee: Ningbo Advanced Memory Technology Corporation,Being Advanced Memory Taiwan Limited
- Current Assignee: Ningbo Advanced Memory Technology Corporation,Being Advanced Memory Taiwan Limited
- Current Assignee Address: CN Ningbo TW Hsinchu County
- Agency: CKC & Partners Co., Ltd.
- Priority: CN201510570548 20150909
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A method of manufacturing a phase change memory includes: (i) forming a first dielectric layer, a conductive contact and a first electrode over a semiconductor substrate; (ii) forming a second dielectric layer having an opening over the first dielectric layer, the opening exposing a top surface of the first electrode; (iii) forming a barrier layer lining a sidewall of the opening; (iv) forming a phase change element in the opening, wherein the phase change element includes a base and a peripheral wall extending upwards along the barrier layer from a periphery of the base, and an inner side of the peripheral wall defines a recess having an inlet and a bottom portion; (v) forming a heater filled in the recess; and (vi) forming a second electrode over the heater. A phase change memory is disclosed herein as well.
Information query
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