Invention Grant
- Patent Title: Electromechanical transducer and method of producing the same
- Patent Title (中): 机电换能器及其制造方法
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Application No.: US14276930Application Date: 2014-05-13
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Publication No.: US09510069B2Publication Date: 2016-11-29
- Inventor: Toshio Tomiyoshi , Kazutoshi Torashima , Takahiro Akiyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. IP Division
- Priority: JP2011-084673 20110406
- Main IPC: H02N1/00
- IPC: H02N1/00 ; H04R19/00 ; H04R1/00 ; B06B1/02 ; B81C1/00
Abstract:
An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
Public/Granted literature
- US20140241129A1 ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME Public/Granted day:2014-08-28
Information query
