Invention Grant
- Patent Title: Encapsulation structure including a mechanically reinforced cap and with a getter effect
- Patent Title (中): 封装结构包括机械加强盖和吸气剂效应
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Application No.: US14331285Application Date: 2014-07-15
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Publication No.: US09511991B2Publication Date: 2016-12-06
- Inventor: Xavier Baillin , Bernard Diem , Jean-Philippe Polizzi , Andre Rouzaud
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1357386 20130726
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00

Abstract:
A microdevice encapsulation structure arranged in at least one cavity formed between a substrate and a cap rigidly attached to the substrate is provided, the cap including one layer of a first material, one face of which forms an inner wall of the cavity, and mechanical reinforcement portions rigidly attached at least to and partly covering said face, having gas absorption and/or adsorption properties, in which the Young's modulus of a second material of the mechanical reinforcement portions is higher than that of the first material, wherein each of said portions includes at least one first layer of the second material, and at least one second layer of a third metallic getter material such that the first layer of the second material is arranged between the layer of the first material and the second layer of the third material and/or is covered by the second layer of the third material.
Public/Granted literature
- US20150028433A1 ENCAPSULATION STRUCTURE INCLUDING A MECHANICALLY REINFORCED CAP AND WITH A GETTER EFFECT Public/Granted day:2015-01-29
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