Invention Grant
- Patent Title: Particle detector and method for producing such a detector
- Patent Title (中): 粒子检测器及其生产方法
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Application No.: US14496072Application Date: 2014-09-25
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Publication No.: US09518909B2Publication Date: 2016-12-13
- Inventor: Sergio Nicoletti
- Applicant: Commissariat A l'Energie Atomique Et Aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Alston & Bird LLP
- Priority: FR1003081 20100722
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N15/02 ; G01N15/14 ; G01N21/53 ; G01N15/06 ; G01N15/00 ; G01N21/47

Abstract:
The invention relates to a particle detector including a substrate made of a semiconductor material, in which at least one through-cavity is formed, defined by an input section and an output section, wherein the input section thereof is to be connected to an airflow source, the substrate supporting: an optical means including at least one laser source, and at least one waveguide connected to the at least one laser source and leading into the vicinity of the output section of the cavity; and a photodetector located near the output section of the cavity and offset relative to the optical axis of the optical means.
Public/Granted literature
- US20150116710A1 Particle Detector and Method for Producing Such a Detector Public/Granted day:2015-04-30
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