Invention Grant
- Patent Title: Method of forming a fully wrapped-around shielded PMR writer pole
- Patent Title (中): 形成完全缠绕屏蔽PMR写入极的方法
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Application No.: US13972002Application Date: 2013-08-21
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Publication No.: US09520146B1Publication Date: 2016-12-13
- Inventor: Jinwen Wang , Weimin Si , Jianxin Fang , Ying Hong , Hongzhou Jiang , Ching-Huang Lu , Yan Chen , Donghong Li , Lien-Chang Wang , Lieping Zhong , Tao Pan
- Applicant: Western Digital (Fremont), LLC
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00 ; G11B5/11 ; G11B5/31

Abstract:
A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.
Information query
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