Invention Grant
US09520146B1 Method of forming a fully wrapped-around shielded PMR writer pole 有权
形成完全缠绕屏蔽PMR写入极的方法

Method of forming a fully wrapped-around shielded PMR writer pole
Abstract:
A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.
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