Invention Grant
- Patent Title: Wafer container with door interface seal
- Patent Title (中): 晶圆容器带门界面密封
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Application No.: US14398958Application Date: 2013-05-06
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Publication No.: US09520310B2Publication Date: 2016-12-13
- Inventor: Barry Gregerson , Matthew A. Fuller
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- International Application: PCT/US2013/039768 WO 20130506
- International Announcement: WO2013/166514 WO 20131107
- Main IPC: H01L21/673
- IPC: H01L21/673 ; B65D85/30 ; F16J15/10
Abstract:
A wafer container may be a front opening wafer container comprising a container portion and a door, one of the container portion and the door having a radially installed seal with a plurality of opposing lateral projections that deflect from a normal position in a direction away from an install direction when the seal is installed in a groove, the lateral projections resisting removal of the seal after the seal is seated in the groove. A core portion and a cantilevered finger member engages the other of the door and container portion when the door is seated in the container portion. Other lateral projections on the seal effectively seal the path between the seal and groove surfaces.
Public/Granted literature
- US20150122699A1 WAFER CONTAINER WITH DOOR INTERFACE SEAL Public/Granted day:2015-05-07
Information query
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