Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US14803776Application Date: 2015-07-20
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Publication No.: US09520403B2Publication Date: 2016-12-13
- Inventor: Jung Ryul Ahn , Yun Kyoung Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-Si
- Assignee: SK HYNIX INC.
- Current Assignee: SK HYNIX INC.
- Current Assignee Address: KR Icheon-Si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2013-0072413 20130624
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L27/115 ; H01L21/8234

Abstract:
A semiconductor memory device includes: a plurality of first channel columns including a plurality of first channel layers that are arranged in a direction and offset by their centers; a plurality of second channel columns alternately arranged with the plurality of first channel columns and having a plurality of second channel layers that are arranged in the direction and offset by their centers; first insulating layers and first conductive layers alternately stacked to surround the first channel layers; second insulating layers and second conductive layers stacked to surround the second channel layers; and spacers placed between the first channel columns and the second channel columns and interposed between the first conductive layers and the second conductive layers.
Public/Granted literature
- US20150325582A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2015-11-12
Information query
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