Invention Grant
US09520409B2 Three-dimensional nonvolatile memory device, semiconductor system including the same, and method of manufacturing the same 有权
三维非易失性存储器件,包括其的半导体系统及其制造方法

Three-dimensional nonvolatile memory device, semiconductor system including the same, and method of manufacturing the same
Abstract:
A three-dimensional nonvolatile memory device includes a first vertical channel layer and a second vertical channel layer extending from a substrate, a plurality of memory cells, first selection transistors and second selection transistors spaced apart from each other along the first vertical channel layer and the second vertical channel layer, a pad, a contact plug and a bit line in a stacked configuration over the first vertical channel layer, and a common source line formed over the second vertical channel layer.
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