Invention Grant
- Patent Title: Ultraviolet light emitting device separated from growth substrate and method of fabricating the same
- Patent Title (中): 与生长衬底分离的紫外线发光器件及其制造方法
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Application No.: US14875578Application Date: 2015-10-05
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Publication No.: US09520533B2Publication Date: 2016-12-13
- Inventor: Chang Suk Han , Hwa Mok Kim , Mi So Ko , A Ram Cha Lee , Dae Woong Suh
- Applicant: Seoul Viosys Co., Ltd.
- Applicant Address: KR Ansan-Si
- Assignee: SEOUL VIOSYS CO., LTD.
- Current Assignee: SEOUL VIOSYS CO., LTD.
- Current Assignee Address: KR Ansan-Si
- Agency: Perkins Coie LLP
- Priority: KR10-2013-0037255 20130405
- Main IPC: H01L33/02
- IPC: H01L33/02 ; H01L33/06 ; H01L21/02 ; H01L33/12 ; H01L33/32 ; H01L33/00 ; H01L33/22 ; H01L33/24 ; H01L33/20

Abstract:
A UV light emitting device and a method for fabricating the same are disclosed. The method includes forming a first super-lattice layer including AlxGa(1-x)N on a substrate, forming a sacrificial layer including AlzGa(1-z)N on the first super-lattice layer, partially removing the sacrificial layer, forming an epitaxial layer on the sacrificial layer, and separating the substrate from the epitaxial layer, wherein the sacrificial layer includes voids, the substrate is separated from the epitaxial layer at the sacrificial layer, and forming an epitaxial layer includes forming an n-type semiconductor layer including n-type AluGa(1-u)N (0
Public/Granted literature
- US20160035935A1 ULTRAVIOLET LIGHT EMITTING DEVICE SEPARATED FROM GROWTH SUBSTRATE AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-02-04
Information query
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