Invention Grant
US09520533B2 Ultraviolet light emitting device separated from growth substrate and method of fabricating the same 有权
与生长衬底分离的紫外线发光器件及其制造方法

Ultraviolet light emitting device separated from growth substrate and method of fabricating the same
Abstract:
A UV light emitting device and a method for fabricating the same are disclosed. The method includes forming a first super-lattice layer including AlxGa(1-x)N on a substrate, forming a sacrificial layer including AlzGa(1-z)N on the first super-lattice layer, partially removing the sacrificial layer, forming an epitaxial layer on the sacrificial layer, and separating the substrate from the epitaxial layer, wherein the sacrificial layer includes voids, the substrate is separated from the epitaxial layer at the sacrificial layer, and forming an epitaxial layer includes forming an n-type semiconductor layer including n-type AluGa(1-u)N (0
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