Invention Grant
- Patent Title: Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded
- Patent Title (中): 图案测量装置,图案测量方法以及记录图案测量程序的计算机可读记录介质
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Application No.: US13898620Application Date: 2013-05-21
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Publication No.: US09521372B2Publication Date: 2016-12-13
- Inventor: Yoshinori Momonoi , Koichi Hamada , Yuji Takagi , Michio Hatano , Hideyuki Kazumi
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2012-115295 20120521
- Main IPC: H04N7/18
- IPC: H04N7/18 ; G06T7/00

Abstract:
There is provided a technique to correctly select and measure a pattern to be measured even when contours of the pattern are close to each other in a sample including a plurality of patterns on a substantially same plane.A pattern measuring apparatus that scans a sample with charged particles, forms a detected image by detecting secondary charged particles or backscattered charged particles generated from the sample, and measures a pattern imaged on the detected image includes: an image acquiring section acquiring a plurality of detected images taken at a substantially same location on the sample under different imaging conditions; a contour extracting section extracting a plurality of pattern contours from the plurality of detected images; a contour reconstructing section reconstructing a contour to be measured by combining the plurality of pattern contours; and a contour measuring section making a measurement using the reconstructed contour to be measured.
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