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US09523625B2 Detecting failure of scanning mirror 有权
检测扫描镜的故障

Detecting failure of scanning mirror
Abstract:
A method for monitoring includes providing a device (64) including a first part (46) and a second part (72) and a movable joint (70) connecting the first part to the second part. An electrical characteristic of a conductive path (80) crossing the movable joint is measured, and a remedial action is initiated in response to detecting a change of the electrical characteristic.
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