Invention Grant
- Patent Title: Micromirror system and method of manufacturing a micromirror system
- Patent Title (中): 微镜系统和微镜系统的制造方法
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Application No.: US14386744Application Date: 2013-03-20
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Publication No.: US09523848B2Publication Date: 2016-12-20
- Inventor: Ulrich Hofmann , Hans-Joachim Quenzer , Joachim Janes , Björn Jensen
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
- Current Assignee Address: DE Munich
- Agency: Faegre Baker Daniels LLP
- Priority: DE102012005546 20120321
- International Application: PCT/EP2013/055852 WO 20130320
- International Announcement: WO2013/139866 WO 20130926
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B7/18 ; G02B7/182 ; B32B37/16 ; B32B38/00 ; B32B38/10 ; G02B1/12
Abstract:
A micromirror system that includes a chip frame, at least one spring element, and at least one mirror plate oscillatorily suspended in the chip frame via the at least one spring element. The chip frame and the at least one spring element include at least one microchannel which is provided with an inlet opening and an outlet opening for leading through a flowing coolant.
Public/Granted literature
- US20150049374A1 MICROMIRROR SYSTEM AND METHOD OF MANUFACTURING A MICROMIRROR SYSTEM Public/Granted day:2015-02-19
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