Invention Grant
- Patent Title: Lateral bipolar junction transistor having graded SiGe base
- Patent Title (中): 具有分级SiGe基极的横向双极结型晶体管
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Application No.: US14208518Application Date: 2014-03-13
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Publication No.: US09525027B2Publication Date: 2016-12-20
- Inventor: Pouya Hashemi , Ali Khakifirooz , Darsen D. Lu , Alexander Reznicek , Dominic J. Schepis
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C.
- Agent Yuanmin Cai; Andrew M. Calderon
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L29/10 ; H01L29/66 ; H01L29/735 ; H01L21/225 ; H01L29/417 ; H01L29/08 ; H01L21/8249 ; H01L27/06 ; H01L29/06 ; H01L29/423 ; H01L27/092

Abstract:
A lateral bipolar junction transistor is fabricated using a semiconductor-on-insulator substrate. The transistor includes a germanium gradient within a doped silicon base region, there being an increasing germanium content in the direction of the collector region of the transistor. The use of a substrate including parallel silicon fins to fabricate lateral bipolar junction transistors facilitates the inclusion of both CMOS FinFET devices and lateral bipolar junction transistors having graded silicon germanium base regions on the same chip.
Public/Granted literature
- US20150263091A1 LATERAL BIPOLAR JUNCTION TRANSISTOR HAVING GRADED SiGe BASE Public/Granted day:2015-09-17
Information query
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