Invention Grant
- Patent Title: Light receiving device and method for manufacturing light receiving device
- Patent Title (中): 光接收装置及其制造方法
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Application No.: US14690128Application Date: 2015-04-17
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Publication No.: US09525087B2Publication Date: 2016-12-20
- Inventor: Yukihiro Tsuji , Hiroshi Inada
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP.
- Priority: JP2014-092655 20140428
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; H01L31/0216 ; H01L31/105 ; H01L31/18

Abstract:
A light receiving device includes a mesa structure including a light absorption layer disposed on a semiconductor region; a passivation film disposed on a side surface of the mesa structure, the passivation film containing oxygen; and a nitriding layer disposed between the side surface of the mesa structure and the passivation film. The light absorption layer includes a super-lattice structure including first semiconductor layers and second semiconductor layers that are alternately stacked. The first semiconductor layer is made of a III-V group compound semiconductor. The second semiconductor layer is made of a III-V group compound semiconductor that is different from the III-V group compound semiconductor of the first semiconductor layer. The first semiconductor layer contains antimony as a group V constituent element. In addition, the nitriding layer is made of a nitride containing a group III constituent element of the first semiconductor layer and/or the second semiconductor layer.
Public/Granted literature
- US20150311366A1 LIGHT RECEIVING DEVICE AND METHOD FOR MANUFACTURING LIGHT RECEIVING DEVICE Public/Granted day:2015-10-29
Information query
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