Invention Grant
US09530624B2 Method for the plasma coating of a substrate, in particular a press platen 有权
用于等离子体涂覆基材,特别是压板的方法

Method for the plasma coating of a substrate, in particular a press platen
Abstract:
An apparatus for the plasma coating of a substrate, in particular a press platen, is provided and is used to perform a method to plasma coat the press platen. The apparatus includes a vacuum chamber and, arranged therein, an electrode, which is segmented. Each of the electrode segments has a dedicated connection for an electrical source. Also provided is the method for operating the apparatus. According to the method, a substrate to be coated is positioned opposite the electrode and at least one energy source that is assigned to an electrode segment is activated. Moreover, a gas is introduced, with the effect of bringing about plasma-enhanced chemical vapor deposition on the substrate.
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