Invention Grant
US09530624B2 Method for the plasma coating of a substrate, in particular a press platen
有权
用于等离子体涂覆基材,特别是压板的方法
- Patent Title: Method for the plasma coating of a substrate, in particular a press platen
- Patent Title (中): 用于等离子体涂覆基材,特别是压板的方法
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Application No.: US14420194Application Date: 2013-08-06
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Publication No.: US09530624B2Publication Date: 2016-12-27
- Inventor: Andreas Gebeshuber , Daniel Heim , Johann Laimer , Thomas Mueller , Michael Proschek , Otto Stadler , Herbert Stoeri
- Applicant: Berndorf Hueck Band- und Pressblechtechnik GmbH
- Applicant Address: AT Berndorf
- Assignee: Berndorf Hueck Band- und Pressblechtechnik GmbH
- Current Assignee: Berndorf Hueck Band- und Pressblechtechnik GmbH
- Current Assignee Address: AT Berndorf
- Agency: Collard & Roe, P.C.
- Priority: ATA877/2012 20120808
- International Application: PCT/AT2013/050152 WO 20130806
- International Announcement: WO2014/022872 WO 20140213
- Main IPC: C23C16/50
- IPC: C23C16/50 ; H05H1/24 ; H01J37/32 ; C23C16/52

Abstract:
An apparatus for the plasma coating of a substrate, in particular a press platen, is provided and is used to perform a method to plasma coat the press platen. The apparatus includes a vacuum chamber and, arranged therein, an electrode, which is segmented. Each of the electrode segments has a dedicated connection for an electrical source. Also provided is the method for operating the apparatus. According to the method, a substrate to be coated is positioned opposite the electrode and at least one energy source that is assigned to an electrode segment is activated. Moreover, a gas is introduced, with the effect of bringing about plasma-enhanced chemical vapor deposition on the substrate.
Public/Granted literature
- US20150255254A1 APPARATUS AND METHOD FOR THE PLASMA COATING OF A SUBSTRATE, IN PARTICULAR A PRESS PLATEN Public/Granted day:2015-09-10
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