Invention Grant
US09530682B2 System and apparatus for holding a substrate over wide temperature range
有权
用于在宽温度范围内保持基板的系统和装置
- Patent Title: System and apparatus for holding a substrate over wide temperature range
- Patent Title (中): 用于在宽温度范围内保持基板的系统和装置
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Application No.: US14275779Application Date: 2014-05-12
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Publication No.: US09530682B2Publication Date: 2016-12-27
- Inventor: Roger B. Fish , W. Davis Lee
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01T23/00 ; H01L21/687 ; H01L21/67
Abstract:
An apparatus to support a substrate may include a base, a clamp portion to apply a clamping voltage to the substrate, and a displacement assembly configured to hold the clamp portion and base together in a first operating position, and to move the clamp portion with respect to the base from the first operating position to a second operating position, wherein the clamp portion and base are separate from one another in the second operating position.
Public/Granted literature
- US20150325464A1 SYSTEM AND APPARATUS FOR HOLDING A SUBSTRATE OVER WIDE TEMPERATURE RANGE Public/Granted day:2015-11-12
Information query
IPC分类:
