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US09531342B2 Piezoelectric thin film resonator, filter and duplexer 有权
压电薄膜谐振器,滤波器和双工器

Piezoelectric thin film resonator, filter and duplexer
Abstract:
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film provided on the substrate; a lower electrode and an upper electrode that are opposed to each other to put at least a part of the piezoelectric film therebetween; and an insertion film that is inserted into the piezoelectric film in a resonance region where at least the part of the piezoelectric film is put between the lower electrode and the upper electrode, at least a part of the insertion film corresponding to an outer circumference region in the resonance region being thicker than a part of the insertion film corresponding to a central region in the resonance region.
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