Invention Grant
- Patent Title: Piezoelectric thin film resonator, filter and duplexer
- Patent Title (中): 压电薄膜谐振器,滤波器和双工器
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Application No.: US14599364Application Date: 2015-01-16
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Publication No.: US09531342B2Publication Date: 2016-12-27
- Inventor: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2014-010791 20140123
- Main IPC: H03H9/70
- IPC: H03H9/70 ; H03H9/17 ; H03H9/56 ; H03H9/02 ; H03H3/04

Abstract:
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film provided on the substrate; a lower electrode and an upper electrode that are opposed to each other to put at least a part of the piezoelectric film therebetween; and an insertion film that is inserted into the piezoelectric film in a resonance region where at least the part of the piezoelectric film is put between the lower electrode and the upper electrode, at least a part of the insertion film corresponding to an outer circumference region in the resonance region being thicker than a part of the insertion film corresponding to a central region in the resonance region.
Public/Granted literature
- US20150207490A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER AND DUPLEXER Public/Granted day:2015-07-23
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