Invention Grant
US09533886B2 Vapour deposition process for the preparation of a phosphate compound 有权
用于制备磷酸盐化合物的气相沉积方法

Vapour deposition process for the preparation of a phosphate compound
Abstract:
The present invention provides a vapour deposition process for the preparation of a phosphate compound, wherein the process comprises providing each component element of the phosphate compound as a vapour, and co-depositing the component element vapours on a common substrate, wherein the component elements react on the substrate to form the phosphate compound.
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