Invention Grant
- Patent Title: Composition for pattern formation, and pattern-forming method
- Patent Title (中): 用于图案形成的组合物和图案形成方法
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Application No.: US14620935Application Date: 2015-02-12
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Publication No.: US09534135B2Publication Date: 2017-01-03
- Inventor: Hiroyuki Komatsu , Takehiko Naruoka , Shinya Minegishi , Tomoki Nagai
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-025978 20140213; JP2014-085946 20140417
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C03C15/00 ; C03C25/68 ; C23F1/00 ; C09D153/00 ; C08F212/08 ; C08F230/08 ; C08F297/02 ; G03F7/00 ; B05D1/18

Abstract:
A composition for pattern formation includes a block copolymer and a solvent. The block copolymer is capable of forming a phase separation structure through directed self-assembly. The block copolymer includes a first block and a second block. The first block includes a first repeating unit which includes at least two silicon atoms. The second block includes a second repeating unit which does not include a silicon atom. A sum of the atomic weight of atoms constituting the first repeating unit is no greater than 700.
Public/Granted literature
- US20150225601A1 COMPOSITION FOR PATTERN FORMATION, AND PATTERN-FORMING METHOD Public/Granted day:2015-08-13
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