Invention Grant
- Patent Title: Protecting anodes from passivation in alloy plating systems
- Patent Title (中): 保护阳极免受合金电镀系统的钝化
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Application No.: US13902517Application Date: 2013-05-24
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Publication No.: US09534308B2Publication Date: 2017-01-03
- Inventor: Lee Peng Chua , Steven T. Mayer , David W. Porter , Thomas A. Ponnuswamy
- Applicant: Novellus Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D21/18
- IPC: C25D21/18 ; C25D5/00 ; C25D21/06 ; C25D17/00 ; C25D17/10 ; C25D3/60

Abstract:
An apparatus for continuous simultaneous electroplating of two metals having substantially different standard electrodeposition potentials (e.g., for deposition of Sn—Ag alloys) comprises an anode chamber for containing an anolyte comprising ions of a first, less noble metal, (e.g., tin), but not of a second, more noble, metal (e.g., silver) and an active anode; a cathode chamber for containing catholyte including ions of a first metal (e.g., tin), ions of a second, more noble, metal (e.g., silver), and the substrate; a separation structure positioned between the anode chamber and the cathode chamber, where the separation structure substantially prevents transfer of more noble metal from catholyte to the anolyte; and fluidic features and an associated controller coupled to the apparatus and configured to perform continuous electroplating, while maintaining substantially constant concentrations of plating bath components for extended periods of use.
Public/Granted literature
- US20130334052A1 PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS Public/Granted day:2013-12-19
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