Invention Grant
US09534895B2 Vibrating element, angular velocity sensor, electronic apparatus, and moving object
有权
振动元件，角速度传感器，电子设备和移动物体
- Patent Title: Vibrating element, angular velocity sensor, electronic apparatus, and moving object
- Patent Title (中): 振动元件，角速度传感器，电子设备和移动物体
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Application No.: US14852796Application Date: 2015-09-14
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Publication No.: US09534895B2Publication Date: 2017-01-03
- Inventor: Masahiro Ishii , Takayuki Kikuchi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2014-193775 20140924
- Main IPC: H03H9/25
- IPC: H03H9/25 ; G01C19/5607 ; H03H9/21
Abstract:
A vibrating element includes a vibration portion including a first main surface, a second main surface, a first side surface, and a second side surface, and extending in a first direction. The vibration portion includes a first groove formed in the first main surface and a second groove formed in the second main surface, and in a plan view seen from a direction perpendicular to the first main surface, the first groove and the second groove are provided to shift in opposite directions from each other, in a second direction.
Public/Granted literature
- US20160087190A1 Vibrating Element, Angular Velocity Sensor, Electronic Apparatus, and Moving Object Public/Granted day:2016-03-24
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